Display apparatus with array of light emitting diodes and method of manufacturing the same

ABSTRACT

A display includes a substrate with a plurality of electronic control elements, an array of light-emitting diodes having a semiconductor layer, a plurality of light emitting units disposed on the semiconductor layer, and a plurality of first electrodes disposed on the semiconductor layer, an bonding layer disposed between the substrate and the array of light-emitting diodes, and a plurality of wavelength conversion elements disposed on the semiconductor layer and spaced apart from each other. The plurality of wavelength conversion elements and the plurality of light emitting units are disposed at different sides of the semiconductor layer. The plurality of wavelength conversion elements is arranged in positions corresponding to the plurality of light-emitting units.

RELATED APPLICATION DATA

This application is a continuation of U.S. application Ser. No.16/447,484 filed Jun. 20, 2019, which claims the right of priority of TWApplication No. 108119854, filed on Jun. 10, 2019, which claimed theright of priority of TW Application No. 107121480, filed on Jun. 22,2018, the contents of which are hereby incorporated by reference intheir entireties.

TECHNICAL FIELD

The application is related to a manufacturing method of a display, andespecially related to a manufacturing method of a display with an arrayof light-emitting diodes.

DESCRIPTION OF BACKGROUND ART

As light-emitting diode (LED) industry progresses and advances, the fullcolor display, which uses light-emitting diodes for self-illuminatingpixels or miniaturized LED display, is booming and a feasible nextgeneration display technology. The display with the self-illuminatingpixels or miniaturized LED, which includes flexible and transparentdisplay, is more popular than TFT-LCD. However, there are cost andtechnology bottlenecks for commercialization to overcome. For example,an active light-emitting diode array display can use bumps formed onelectrodes to electrically connect a driver carrier and a light-emittingdiode array. This connecting method is difficult to be implemented, andthe alignment between the bumps and the electrodes of light-emittingdiodes is not easy as well. Furthermore, there is no underfill betweenand supporting the driver carrier and the light-emitting diode array sothe growth substrate for forming the light-emitting diode array cannotbe removed. Therefore, the existence of the growth substrate affects thelight between the neighboring pixels and causes cross-talk influencingthe image quality.

SUMMARY OF THE DISCLOSURE

The application is related to a display apparatus with an array of lightemitting diodes and a method of manufacturing the same. In embodiment, abonding layer is formed between a driver substrate and an array of lightemitting diodes, and the growth substrate for forming the array of lightemitting diodes can be removed after forming the bonding layer. Thecrosstalk between the pixels is therefore eliminated.

One embodiment discloses a display including a substrate including aplurality of control elements, an array of light emitting diodes whichincludes a semiconductor layer, a plurality of light-emitting unitsformed on the semiconductor layer and a plurality of first electrodesformed on the semiconductor layer, a bonding layer formed between thesubstrate and the array of light emitting diodes, and a plurality ofwavelength conversion elements. The wavelength conversion elements andthe light-emitting units are disposed at different sides of thesemiconductor layer. The plurality of wavelength conversion elements isarranged in positions corresponding to the plurality of light-emittingunits. The plurality of wavelength conversion elements is spaced apartfrom each other.

One embodiment discloses a display including a substrate with aplurality of electronic control elements, an array of light emittingdiodes including a semiconductor layer, a plurality of light-emittingunits formed on the semiconductor layer, and a plurality of firstelectrodes formed on the semiconductor layer, and a bonding layerincluding a bonding glue and a plurality of connecting metals in thebonding glue. The bonding glue is arranged between the substrate and thearray of light emitting diodes. The plurality of connecting metalsincludes a plurality of first portions which corresponds to theplurality of light-emitting units, and a plurality of second portionswhich corresponds to a portion of the plurality of first electrodes. Theplurality of first portions and the plurality of second portions havedifferent heights.

One embodiment discloses a method of manufacturing a display. The methodincludes steps of providing a substrate, forming a plurality ofconnecting metals on the substrate, providing an array of light emittingdiodes, connecting the array of light emitting diodes and the substrate,forming a bonding glue between the substrate and the array of lightemitting diodes, and forming a plurality of wavelength conversionelements on the semiconductor layer. The substrate includes a pluralityof electronic control elements. The plurality of connecting metalsincludes a plurality of first portions and a plurality of secondportions. The array of light emitting diodes includes a semiconductorlayer and a plurality of light-emitting units formed on thesemiconductor layer. The wavelength conversion elements and thelight-emitting units are disposed at different sides of thesemiconductor layer. The plurality of wavelength conversion elements isarranged in positions corresponding to the plurality of light-emittingunits. The plurality of wavelength conversion elements is arranged tospace apart from each other. The step of forming the bonding glue can beperformed before or after the step of connecting the array of lightemitting diodes and the substrate.

For better understanding the above and other aspects of the presentapplication, the following specific embodiments are described in detailbelow with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an array of light-emitting diodes (LED array) andelectrodes in accordance with one embodiment of present application;

FIG. 2 shows a cross-sectional diagram of a display in accordance withone embodiment of present application, wherein the LED array and theelectrodes are depicted along sectional line 2-2 of FIG. 1;

FIGS. 3A-3E show a method of manufacturing a display in accordance withone embodiment of present application;

FIGS. 4A-4C show a method of manufacturing a wavelength conversionelement in accordance with one embodiment of present application;

FIG. 5 shows a schematic cross-sectional view of a display in accordancewith one embodiment of present application;

FIG. 6 shows a schematic cross-sectional view of a display in accordancewith one embodiment of present application;

FIG. 7 shows a schematic cross-sectional view of a display in accordancewith one embodiment of present application;

FIGS. 8A and 8B show a bonding process in accordance with one embodimentof present application;

FIG. 9 shows a schematic cross-sectional view of a display in accordancewith one embodiment of present application;

FIGS. 10A-10F show one method of manufacturing the display as shown inFIG. 9;

FIGS. 11A-11G show another method of manufacturing the display as shownin FIG. 9;

FIG. 12 shows a top view of an LED array and electrodes in accordancewith one embodiment of present application;

FIG. 13 shows a cross-sectional view of a display in accordance with oneembodiment of present application, wherein the LED array and theelectrodes are depicted along sectional line 13-13 of FIG. 12.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

In the following embodiments of the application, a display with a lightemitting diode array (LED array) and a method of manufacturing the sameare provided, wherein a bonding layer is formed between a driver carrier(e.g., a CMOS substrate) and the LED array. The bonding layer includes abonding metal and a bonding glue, wherein the bonding metal can provideelectrical connection between the driver carrier and the LED array, andthe bonding glue fills a gap between the driver carrier and the LEDarray and provides support. Therefore, during the process ofmanufacturing the display in accordance with one embodiment of presentapplication, the growth substrate (for example, the sapphire substrate),which is used to form the LED array, can be removed after the bondinglayer is disposed. And then, according to application requirements, awavelength conversion layer (for example, a wavelength conversionelement including quantum dot fluorescent powder) can be formed on thesurfaces of the LED array to emit red light, green light and blue lightto form the full color. Therefore, compared with the conventionalstructure, the display disclosed in the embodiment has a bonding gluefor supporting the driver carrier and the LED array and improving thereliability of the driver carrier and the LED array. Since the growthsubstrate is removed, the overall thickness of the display is reduced,and the flexibility of the display can be increased so the display canbe adapted to various applications. If the wavelength conversion layeris applied to miniaturized light-emitting diode array, the displaywithout the growth substrate as shown in FIG. 6 can be free from mutualinterference of optical signals between sub-pixels (also known ascross-talk). Furthermore, the method of manufacturing a displaydisclosed in the following embodiments includes inter-filling andelectrical connecting between a light-emitting diode having the same ordifferent electrode horizontal levels (in particular, the n-electrodeand the p-electrode are in different horizontal levels) and the drivercarrier. Therefore, the formation of the bonding metal and the bondingglue in the bonding layer does not cause damage to the driver carrierand the LED array, and the manufacturing process of the display with theLED array is not necessarily time-consuming and expensive. In that case,the structure and the manufacturing method mentioned in the embodimentare suitable for mass production.

The displays disclosed in the embodiments are widely used. The followingembodiments are exemplified by a display having a miniaturized-LEDarray, but the disclosure is not limited to the aspect. The followingembodiments are described in conjunction with the drawings to explain indetail the related structures of the display and the manufacturingmethod thereof. In the embodiments, the same or similar referencenumerals are used to designate the same or similar parts for clarity ofexplanation. However, the description of the embodiments, such as thedetailed structure, the process steps, the material application, and thelike, are only for illustrative purposes, and the scope of thedisclosure is not limited to the described aspects. The disclosure doesnot show all possible embodiments, and the structure and processdisclosed in the embodiments may be modified to meet the needs ofpractical applications without departing from the spirit and scope ofthe disclosure. Therefore, other implementations not presented in thepresent application may also be applicable. In addition, the drawingshave been simplified to clearly illustrate the contents of theapplication, and the dimensional ratios in the drawings are not drawn inproportion to actual products. Therefore, the description and drawingsare for illustrative purposes only and are not intended to be limited.

Furthermore, the terms used in the specification and the claims, such as“first”, “second”, etc., are used to modify the elements of the claim,which are not intended to be the previous ordinal of the element, doesnot represent the order of one element and another request element, orthe order of the manufacturing method. The use of these ordinals is onlyused to distinguish two elements with a certain names. In addition, whena first material layer is described to be above, upon or on a secondmaterial layer, unless otherwise defined, the first material layer maybe directly in contact with the second material layer. Alternatively, itis also possible to have one or more layers of other materialsinterposed, in which case there may be no direct contact between thefirst material layer and the second material layer.

FIG. 1 shows a top view of an LED array 31 bonded with a driver carrier21 in accordance with one embodiment of present application. FIG. 2shows a cross-sectional diagram of the LED array 31 bonded with thedriver carrier 21 along sectional line 2-2 of FIG. 1. In thisembodiment, the structure of the LED array 31, which can be aminiaturized-LED array, bonded with the driver carrier 21 can be appliedfor forming a display. As shown in FIG. 2, the LED array 31 includes afirst semiconductor layer 311, a plurality of light-emitting units (LU)formed on the first semiconductor layer 311, a plurality of firstelectrodes 316, such as n-electrodes, formed on the first semiconductorlayer 311, and a plurality of second electrodes 317, such asp-electrodes, form on the plurality of light-emitting units (LU). Thefirst semiconductor layer 311 is a first conductive type semiconductorlayer, and each of the light emitting units (LU) includes an activelayer 312 (e.g., Multiple Quantum Well, MQW) and a second semiconductorlayer 313 formed on the active layer 312, wherein the secondsemiconductor layer 313 is a second conductive type semiconductor layer,and the second electrodes 317 are respectively formed on the secondsemiconductor layer 313 of each of the light-emitting units (LU). In oneembodiment, the first conductive type and the second conductive type arerespectively n-type and p-type. In the embodiment, the firstsemiconductor layer 311 and the second semiconductor layer 313 can be acladding layer or a confinement layer, which are formed by epitaxialgrowth on a growth substrate, such as sapphire or GaAs substrate, andable to respectively provide electrons and holes for being combined inthe active layer 312 to emit light. The first semiconductor layer 311,the active layer 312, and the second semiconductor layer 313 may includeIII-V semiconductor material, such as Al_(x)In_(y)Ga_((1-x-y))N orAl_(x)In_(y)Ga_((1-x-y))P, where 0≤x, y≤1; (x+y)≤1. Based on thematerial of the active layer 312, the light-emitting unit (LU) is ableto emit a red light with a peak wavelength between 580 nm and 700 nm, agreen light with a peak wavelength between 530 nm and 570 nm, and a bluelight with peak wavelength between 450 nm and 490 nm, or a UV light withpeak wavelength between 380 nm and 420 nm, such as 400 nm. In oneexample, the first semiconductor layer 311 is n-GaN, the active layer312 is a multiple quantum well (MQW), and the second semiconductor layer313 is p-GaN, and each of the light emitting units LU emits blue lightwith a peak wavelength between 450 nm and 490 nm. In another embodiment,the LED array 31 further includes an insulating layer 315 covering thefirst semiconductor layer 311 and the light emitting unit LU, and theinsulating layer 315 exposes a portion of the surface 313 a of thesecond semiconductor layer 313 of each of the light emitting units LU.Each of the second electrodes 317 is formed on the surface 313 a andcontacts the second semiconductor layer 313, wherein the first portions421 of the connecting metals 42 of the bonding layer 40 is respectivelyconnected to the second electrode 317 on each of the light emittingunits (LU), as shown in FIG. 2.

As shown in FIG. 1, the plurality of light-emitting units LU and theplurality of first electrodes 316 being made by a metal grid areexemplified. For example, the plurality of first electrodes 316, whichcan be n-electrodes, includes a plurality of conductive pads 316Plocated on the periphery of the LED array 31 (e.g., four conductive pads316P shown in FIG. 1) and a plurality of extensions between adjacentlight-emitting units LU, including a plurality of first metal traces3161 extending along a first direction D1 (e.g., X direction) and aplurality of second metal traces 3162 extending along the seconddirection D2 (e.g., Y direction), and the plurality of first metaltraces 3161 and the plurality of second metal traces 3162 areelectrically connected to the corresponding conductive pads 316P. Thefirst and second metal traces 3161, 3162 can reduce the value of theseries resistance and make the series resistance of each pixel currentpath nearly uniform. In other embodiment, the plurality of firstelectrodes 316 can be p-electrode.

As FIG. 2 shows, in accordance with one embodiment of presentapplication, the LED array 31 is bonded to the driver carrier 21 havinga plurality of electronic control elements. The driver carrier 21 suchas a CMOS backplane or any substrate having a control circuit thereoncan electrically connect to the LED array 31 for controlling theelectric current driving each pixel. The display disclosed in theembodiment further includes a bonding layer 40 formed between the drivercarrier 21 and the LED array 31. As shown in FIG. 2, the bonding layer40 includes a bonding glue 41 (e.g., non-conductive glue) and aplurality of connecting metals 42 in the bonding glue 41. The bondingglue 41 fills a gap between the driver carrier 21 and the LED array 31.After the driver carrier 21 and the LED array 31 are joined, the bondingglue 41 can support the driver carrier 21 and the LED array 31 andappropriately block the moisture from eroding the first and secondelectrodes 316, 317 and from entering the structure of the LED array 31.

As shown in FIG. 2, the connecting metal 42 includes a plurality offirst portions 421 corresponding to the light-emitting units (LU), and aplurality of second portions 422 corresponding to the conductive pads316P of the first electrodes 316 located at the periphery of the LEDarray 31. That is, the second portion 422 of the connecting metal 42corresponds to the conductive pads 316P. The height d1 of the firstportion 421 is different from the height d2 of the second portion 422.

Furthermore, in the embodiment, the display further includes a pluralityof second electrodes 317, such as p-electrodes, respectively formed oneach of the light-emitting units (LU), wherein the first portions 421 ofthe connecting metals 42 are connected to the second electrodes 317. Inthe embodiment which shows the miniaturized-LED array, the secondelectrodes 317 (for example, p-electrodes) are formed on each of theplurality of light-emitting units (LU), and the first electrode 316 (forexample, n-electrode) is shared by the plurality of light-emitting units(LU). The material of the first electrodes 316 and the second electrodes317 may be made of transparent conductive material or metal material.The transparent conductive material includes indium tin oxide (ITO),indium oxide (InO), tin oxide (SnO), cadmium tin oxide (CTO), antimonytin oxide (ATO), aluminum zinc oxide (AZO), zinc tin oxide (ZTO),gallium zinc oxide (GZO), indium tungsten oxide (IWO), zinc oxide (ZnO),aluminum gallium arsenide (AlGaAs), gallium nitride (GaN), galliumphosphide (GaP), gallium arsenide (GaAs), gallium arsenide phosphide(GaAsP), indium zinc oxide (IZO), and diamond-like carbon (DLC). Themetal material includes aluminum (Al), chromium (Cr), copper (Cu), tin(Sn), gold (Au), nickel (Ni), titanium (Ti), platinum (Pt), lead (Pb),Zinc (Zn), cadmium (Cd), antimony (Sb), cobalt (Co), and alloyscontaining the above.

In the embodiment, the driver carrier 21 (with control circuit) has aplurality of pads 22 thereon. The other end of the connecting metal 42of the bonding layer 40 is connected to the pad 22 on the driver carrier21. As shown in FIG. 2, the pads of the driver carrier 21 may include aplurality of first control pads 221 and a plurality of second controlpads 222, wherein the first portions 421 of the connecting metals 42electrically connect the first control pads 221 and the secondelectrodes 317, and the second portions 422 of the connecting metals 42electrically connect the second control pads 222 and the conductive pads316P of the first electrode 316 located on the periphery of the LEDarray 31. In this embodiment, there is a connecting portion 316C on theconductive pad 316P so that the second portion 422 of the connectingmetal 42 can be electrically connected with the conductive pad 316Pthrough the connecting portion 316C. Furthermore, in this embodiment,the thickness of the connecting portion 316C may be equal to or notequal to the thickness of the second electrode 317. For example, asshown in FIG. 2, the thickness of the connecting portion 316C can beslightly larger than the thickness of the second electrode 317.

In addition, in the embodiment, the horizontal level of the firstelectrode 316 is different from the horizontal level of the secondelectrode 317. For example, the conductive pad 316P of the firstelectrode is closer to the first semiconductor layer 311 than the secondelectrode 317 is. And, the connecting portion 316C on the conductive pad316P is also closer to the first semiconductor layer 311 than the secondelectrode 317 is. Therefore, as shown in FIG. 2, in the bonding layer40, the height d1 of the first portion 421 of the connecting metal 42 issmaller than the height d2 of the second portion 422. Still, thearrangement of the first electrode 316 and the second electrode 317 ofthe LED array 31 is not limited to the structure shown in FIG. 2. Inpractical application, the height d1 of the first portion 421 of theconnecting metal 42 and the height d2 of the second portion 422 aresubject to the arrangement of the first electrode 316 and the secondelectrode 317. And, in the embodiment, the heights d1, d2 can bedifferent or the same. In addition, in other embodiments, the conductivepad 316P may not have the connecting portion 316C disposed thereon.

In accordance with the embodiment of the present application, inaddition to the connecting metal 42 in the bonding layer 40 being ableto provide electrical connection between the driver carrier 21 and theLED array 31, the bonding glue 41 of the bonding layer 40 is filled inthe gap between the driver carrier 21 and the LED array 31 to supportthe driver carrier 21 and the LED array 31. Therefore, the growthsubstrate originally used to form the LED array 31 can be removed afterthe formation of the bonding layer 40 (including the formation of theconnecting metal 42). After removal of the growth substrate, wavelengthconversion elements 45, such as QD phosphors, may be formed on thesurface of the first semiconductor layer 311 opposite to thelight-emitting units (LU) to achieve the full color. Taking the LUemitting blue light as an example, a portion of blue light can beconverted into red light and green light for achieving the full color bywavelength conversion components 45.

In addition, in production, the LED array 31 can be cut from a wafercontaining a plurality of light-emitting units (LU). For example, whenan LED array with 1K*1K light-emitting units (LU) is fabricated, it isnecessary to form 1000 light-emitting units (LU) in each of twodirections of the LED array 31 on a wafer; after cutting the LED array31 from the wafer, the LED array 31 is bonded to a driver carrier 21(e.g., a CMOS substrate), as shown FIG. 2. Certainly, it is not limitedthereto. In another embodiment, an LED wafer, which is a wafer havinglight-emitting units (LU) formed thereon, may be bonded with the drivercarrier 21 firstly, and then, the wafer is cut to from the structureshown in FIG. 2. In FIG. 1, the alignment marks 318, such as crosses,are formed at the four corners of the LED array 31 for the drivercarrier 21 to align with the LED array 31 during bonding process. In theembodiment, the alignment marks 318 can be, but not limited to, formednear the end of the conductive pad 316P.

FIGS. 3A-3E show a method of fabricating a display in accordance with anembodiment of the present application. The same elements in FIGS. 3A-3Eand FIG. 2 are denoted by the same reference numerals for clarity ofexplanation. As shown in FIG. 3A, a driver carrier 21 (e.g., a CMOSbackplane) and a light emitting assembly 3 (e.g., LED wafer) areprovided, and the light emitting assembly 3 includes a growth substrate310 and the LED array 31, which, as abovementioned, includes a firstsemiconductor layer 311, a plurality of light-emitting units (LU), theinsulating layer 315, the plurality of first electrodes 316, and theplurality of second electrodes 317. For details of the elementarrangement of the driver carrier 21 and the LED array 31, please referto the abovementioned description, and the details thereof are notdescribed herein. In one embodiment, the growth substrate 310 can be apatterned sapphire substrate, and the first semiconductor layer 311 andthe plurality of light-emitting units (LU) including gallium nitride(GaN) can be epitaxially grown on the growth substrate 310 by metalorganic chemical-vapor deposition (MOCVD).

Thereafter, as shown in FIG. 3B, a bonding layer 40, including a bondingglue 41 and a plurality of connecting metals 42, is formed between thedriver carrier 21 and the LED array 31. Each of the connecting metals 42includes a first portion 421 corresponding to the light-emitting unit(LU) and a second portion 422 corresponding to the first electrode 316,such as the conductive pad 316P. The detail of the connecting metal 42is recited in the above description, and the details thereof are notdescribed herein.

After the driver carrier 21 and the light emitting assembly 3 (e.g., LEDwafer) including the LED array 31 are bonded, the bonding glue 41 fillsthe gap between the driver carrier 21 and the light emitting assembly 3for supporting the driver carrier 21 and the LED array 31. Next, asshown in FIG. 3C, the growth substrate 310 can be removed. In oneembodiment, the growth substrate 310 can be removed by laser lift-offmethod.

Then, as shown in FIG. 3D, because the bonding glue 41 supports the LEDarray 31, a wavelength conversion element 45, such as quantum dots (QD,a fluorescent luminescent crystal), can be formed on the surface of thefirst semiconductor layer 311 opposite to the surface on which thedifferent light-emitting units LU are located. In one embodiment, whenthe QD is excited by blue light with short-wavelength (high-energy), thephotons with long-wavelength (low-energy) are emitted, and the emittedphotons have narrow wavelength distribution and controllable peakwavelength. By controlling the QD process, the size and the sizedistribution of QD can be adjusted to control the peak wavelength forconverting to different light and achieve a narrow wavelengthdistribution. In one embodiment, the wavelength conversion element 45includes a plurality of red wavelength conversion elements 45R and aplurality of green wavelength conversion elements 45G. To be morespecific, one of the red wavelength conversion elements 45R (emittingred light with a peak wavelength between 580 nm and 700 nm) is disposedon one of the light-emitting units (LU), one of the green wavelengthconversion elements 45G (emitting green light with a peak wavelengthbetween 530 nm and 570 nm) is disposed on one of the light-emittingunits (LU), and one light-emitting unit (LU), which emits blue lightwith a peak wavelength between 450 nm and 490 nm for example, does nothave the wavelength conversion element disposed thereon together form aRGB pixel. Multiple RGB pixels are formed to achieve a full colordisplay. In one embodiment, the first semiconductor layer 311 has afirst surface 311 a and a second surface 311 b opposite to the firstsurface 311 a (namely, upper and lower surfaces), wherein the firstsurface 311 a faces the driver carrier 21, and the light-emitting units(LU) are formed on the first surface 311 a. The wavelength conversionelements 45 (e.g., the red wavelength conversion element 45R and thegreen wavelength conversion element 45G) are formed on the secondsurface 311 b and respectively corresponding to a portion of thelight-emitting units (LU), wherein the wavelength conversion elements 45are spaced apart from each other. In accordance with the embodiment,because the structure of the display does not have the growth substrate,mutual cross-talk of the optical signals between the pixels can beavoided, and the overall thickness of the display can also be reducedfor increasing the flexibility of the display.

Next, as shown in FIG. 3E, a waterproof layer 46 is formed on the secondsurface 311 b of the first semiconductor layer 311 and covers thewavelength conversion elements 45 (45R/45G). In one embodiment, thewavelength conversion element 45 can be a quantum dot (QD) phosphormaterial layer, and the waterproof layer 46 is a transparent waterprooffilm and made of epoxy or other material which can block moisture andhas highly transmittance (for example, a transmittance coefficient ofthe waterproof layer 46 with respect to the light emitted by thelight-emitting unit (LU) is greater than 90%) to protect a quantum dotphosphor material that is susceptible to moisture. Further, in theabovementioned step shown in FIG. 3D, the wavelength conversion element45 can be formed by photolithography process.

FIGS. 4A-4C illustrate a method for manufacturing a wavelengthconversion element 45 in accordance with one embodiment of the presentapplication. As shown in FIG. 4A, a photoresist PR is formed on thefirst semiconductor layer 311. Then, as shown in FIG. 4B, a patternedphotoresist PR′ is formed by photolithography process, wherein thepatterned photoresist PR′ includes an opening corresponding to theposition where the red wavelength conversion element 45R is subsequentlyformed. Then, as shown in FIG. 4C, the red wavelength conversion element45R is formed and the patterned photoresist PR′ is removed. Similarly,the green wavelength conversion element 45G can be formed with the samesteps as shown in FIGS. 4A-4C to complete the fabrication of thewavelength conversion element 45 as shown in FIG. 3D.

In addition, the abovementioned embodiment is explained by thelight-emitting unit (LU) made of a blue GaN layer, the red wavelengthconversion element 45R and the green wavelength conversion element 45G(e.g., FIGS. 2, 3A-3E), but the disclosure is not limited to thisaspect. In practical application, the wavelength conversion element 45is appropriately disposed in accordance with the color of the lightemitted by the light-emitting unit (LU). For example, in one embodiment,if the light-emitting unit (LU) emits ultraviolet (UV) light, a bluewavelength conversion element is required to convert the non-visible UVlight into blue light.

FIG. 5 shows a cross-sectional view of a display in accordance withanother embodiment of the present application. The same components inFIG. 5 and FIG. 3D are denoted by the same reference numerals forclarity of explanation, the contents of the components are as describedabove, and the detailed description thereof will not be repeated here.In FIG. 5, a red wavelength conversion element 45R, a green wavelengthconversion element 45G, and a blue wavelength conversion element 45B areformed on the first semiconductor layer 311 to form a RGB pixel, andaccordingly multiple RGB pixels are formed to achieve a full colordisplay.

Furthermore, in some embodiments, low transmittance material ornon-transmittance material, such as an opaque material, may be formed tosurround each wavelength conversion element 45. FIG. 6 shows across-sectional view of a display in accordance with another embodimentof the present application. The same components in FIG. 6 and FIG. 3Dare denoted by the same reference numerals for clarity of explanation,and the contents of the components are as described above and thedetailed description thereof will not be repeated here. In FIG. 6,opaque material OM is formed on the first semiconductor layer 311 tosurround each of the wavelength conversion elements 45. For example, theopaque material OM surrounds the red wavelength conversion element 45Rand the green wavelength conversion element 45G to reduce the mutualinterference of light (cross-talk) emitted from the red wavelengthconversion element 45R and the green wavelength conversion element 45G.The opaque material OM can be made of black, white or othernon-transmittance material, such as black pigment and white pigment. Thematerial of black pigment includes carbon black, and the material of thewhite pigment includes titanium oxide, silicon dioxide, aluminum oxide,magnesium oxide, zinc oxide, zinc sulfide or zirconia oxide.

FIG. 7 shows a cross-sectional view of a display in accordance withanother embodiment of the present application. The same or similarelements in FIG. 7 and FIG. 2 are denoted by the same or similarreference numerals for clarity of explanation. In this embodiment, thehorizontal level of the first electrodes 316 (e.g., the conductive pad316P) is different from the horizontal level of the second electrode 317(e.g., the conductive pad 316P is closer to the first semiconductorlayer 311 than the second electrode 317 is). In this embodiment, theconnecting portion 316C is not formed under the first electrode 316, forexample, above under the conductive pad 316P. Therefore, as shown inFIG. 7, the connecting metal 42 including the second portions 422directly connects the conductive pads 316P and the second control pads222 of the driver carrier 21. The height d2′ of the second portion 422in FIG. 7 is greater than the height d2 of the second portion 422 inFIG. 2. The arrangement of the first portions 421 and the secondportions 422 of the connecting metals 42 and the relative horizontallevels of the first electrode 316 and the second electrode 317 are notlimited to embodiments shown in the FIG. 2 and FIG. 7. The heights d1and d2′ of the connecting metal 42 are different or close to each other,and the horizontal levels of the first electrodes 316 and the secondelectrodes 317 are different or close to each other, which areapplicable to the structures of the disclosed embodiments. However, thehorizontal levels of the first electrode 316 and the second electrode317 in the structure of this embodiment are different and the height d1and height d2 of the connecting metals are different, the methoddisclosed in the embodiment can ensure the electrical conduction betweenthe driver carrier 21 and the first electrodes 316 and the secondelectrodes 317 for the LED array 31 with the different heights d1 andd2.

FIGS. 8A and 8B show a bonding process in accordance with an embodimentof the present application. FIG. 8A shows a state of bonding layer 40′before heating step of the bonding process, and FIG. 8B shows a state ofthe bonding layer 40 after heating step of the bonding process. Inaddition, the same elements in the drawings of FIGS. 8A and 8B and thoseof FIGS. 3A and 3B are denoted by the same reference numerals forclarity of explanation. In this embodiment, a self-assembly conductivepaste is used in the bonding process.

As shown in FIG. 8A, the driver carrier 21 and a light emitting assembly3 are filled with a self-aligned conductive paste between thereof, andthe self-aligned conductive paste includes a non-conductive glue 410 anda plurality of conductive particles 420 before being heated. Theconductive particles 420 are approximately uniformly dispersed in thenon-conductive glue 410 as shown in FIG. 8A; namely, in thenon-conductive glue 410, the distribution density of the conductiveparticles 420 corresponding to the first electrode 316 and the secondelectrode 317 is similar to the distribution density of the conductiveparticles 420 corresponding to the area other than the first electrode316 and the second electrode 317. Then, the self-aligned conductivepaste shown in FIG. 8A is heated in the bonding process. For example,the structure shown in FIG. 8A is heated in a low temperature range(e.g., a temperature between about 140° C. to 180° C.) for a short time(e.g., about 30 seconds to 3 minutes), and then, the conductiveparticles 420 are melted and electrically connected with the firstelectrode 316, the second electrode 317 and the control pads 221/222. Asshown in FIG. 8B, a portion of the conductive particles 420 are gatheredbetween the first electrode 316/the second electrode 317 and the controlpads 221/222, and form the first portion 421 and the second portion 422of the connecting metal 42 as mentioned in the above embodiment. Thenon-conductive glue 410 and the remaining of the conductive particles420, which are not forming the connecting metal 42, form the bondingglue 41 of the bonding layer 40 as mentioned in the above embodiment.After the bonding process, the non-conductive glue 410 is alsosolidified due to the heating process.

The plurality of conductive particles 420 includes metal material havinga melting point less than 300° C. The metal material may be an element,such as bismuth (Bi), tin (Sn), silver (Ag) and indium (In), a compoundor an alloy and an alloy thereof (e.g., alloy of tin antimony silver).When the conductive particles 21 are alloys, the melting point of theconductive particles 21 refers to the eutectic point of the alloy. Thenon-conductive glue 410 may be a thermosetting polymer, such as epoxy,silicone, polymethyl methacrylate and episulfide. The non-conductiveglue 410 can be cured at a curing temperature. In an embodiment, themelting point of the conductive particles 420 is lower than the curingtemperature of the non-conductive glue 410. As shown in FIG. 8A, beforethe heating process, the grain size of the conductive particle 420 isdefined as the diameter of the conductive particle 420, and the shortestdistance between the two adjacent second electrodes 317 is preferablymore than twice the grain size of the conductive particle 420. In oneembodiment, the conductive particles 420 are solder balls, which has agrain size between 1 μm˜50 μm (inclusive). However, the numerical valuesare only presented as examples and are not intended to limit thedisclosure.

For the structural form of the first electrode 316 and the secondelectrode 317 having different horizontal levels (the heights of theconnecting metals d1 and d2 are different), if an anisotropic conductivefilm (ACF) is pressed for respectively bonding the first/secondelectrodes 316/317 and the control pad 221/222 on the driver carrier 21,the first/second electrodes 316/317, which have different horizontallevels, may accept different forces during pressing ACF for resulting inconduction failure between the second electrode 317 and the drivercarrier 21. Therefore, compared with the conventional method of platingthe contacts (bumps) on the first electrode 316 and the second electrode317 or using an anisotropic conductive film (ACF) bonding, the bondingmethod proposed in the embodiment using the abovementioned self-alignedconductive paste, which has the characteristics of the self-aligninggroup after heating without pressing, can ensure the electricalconduction between the driver carrier 21 and the first electrode 316,the second electrode 317 and prevents the different and uneven forcesthereon caused by the difference of horizontal levels of the firstelectrode 316 and the second electrode 317 or the difference of theheights d1 and d2 of the connecting metals 421, 422. Moreover, since theself-aligned conductive paste has the characteristics of self-assemblyafter heating without the conventional problem that the contacts pointare not easy to be aligned, the bonding process with the self-alignedconductive paste is easy and quick, and is suitable for mass production.

In addition to the self-aligned conductive paste as mentioned above,other materials and methods can be used to form the bonding layer 40 ofthe embodiment. FIG. 9 shows a cross-sectional view of a display inaccordance with another embodiment of the present application. The sameor similar reference numerals are used for the same or similarcomponents, and the description of the same or similar components is asdescribed above, which will not be described herein. As shown in FIG. 9,the bonding layer 50 may include a bonding glue 51 and a plurality ofconnecting metals 52. The connecting metals 52 include a plurality offirst portions 521 and a plurality of second portions 522, wherein thefirst portions 521 are corresponding to the light-emitting units (LU)and the second portions 522 are corresponding to the conductive pads316P. For details of the connecting and disposing method, please referto the descriptions of the first portion 421 and the second portion 422shown in FIG. 2. In the embodiment as shown in FIG. 2, the connectingmetal 42 can be formed by melting and agglomerating the conductiveparticles 420 in a heating step. Further, in the embodiment as shown inFIG. 9, the connecting metal 52 can be formed of a metal body or otherelectric conductor by photolithography process. The connecting metal 52of the bonding layer 50 can be metal, such as indium and tin, or otherelectrical conductor, and the bonding glue 51 of the bonding layer 50can be polymer with high transmittance, such as Benzocyclobutene polymer(BCB-based polymer) and resin. The BCB-based polymer is a thermosettingpolymer with low dielectric property and has excellent bonding ability,chemical resistance and good bonding strength. The material of the resinincludes thermosetting polymer and flux, wherein the thermosettingpolymer can be epoxy resin. Other material with high transmittance(e.g., the transmittance for the light emitted from the light-emittingunit is more than 90%) and adhesive property can also be applied, notlimited to BCB-based polymer or resin.

FIGS. 10A-10F shows one of the methods of manufacturing the display asshown in FIG. 9. The same elements in FIGS. 10A-10F and FIGS. 3A-3E aredenoted by the same reference numerals, and the contents of the relatedelements can refer to the aforementioned relevant paragraphs. As shownin FIG. 10A, a driver carrier 21 (having a control circuit, such as aCMOS backplane) is provided and has a plurality of pads 22 (e.g., afirst control pad 221 and a second control pad 222). Next, a photoresistPR is formed over the driver carrier 21 as shown in FIG. 10B. Thephotoresist PR is treated by photolithography process to form apatterned photoresist PR′, and a plurality of openings are formed forthe connecting metals 52 to be formed in the following step as shown inFIG. 10C. Thereafter, a metal layer (such as indium, tin, copper, gold,aluminum, silver) or other electrically conductive layer is formed onthe opening by vapor deposition to form the first portions 521 and thesecond portions 522 of the connecting metals 52. And then, the patternedphotoresist PR′ is removed as shown in FIG. 10D. Next, the structureshown in FIG. 10D and the LED array 31 are aligned and connected, andthen the bonding glue 51 is filled within the space between the drivercarrier 21 and the LED array 31 as shown in FIG. 10E. Then, wavelengthconversion elements 45 (e.g., 45R/45G or 45R/45G/45B, depending on thecolor of the light from LU) are formed as shown in FIG. 10F.

FIGS. 11A-11G show another method of manufacturing the display as shownin FIG. 9. The same elements in the drawings of the 11A-11G and the3A-3E are denoted by the same reference numerals, and the contents ofthe related elements can refer to the aforementioned relevantparagraphs. As shown in FIG. 11A, a driver carrier 21 (having a controlcircuit, such as a CMOS backplane) is provided and has a plurality ofpads 22 (e.g., first control pads 221 and second control pads 222) onthereof. Next, a photoresist PR is formed over the driver carrier 21 asshown in FIG. 11B. The photoresist PR is treated by photolithographyprocess to form a patterned photoresist PR′, and a plurality of openingsare formed for the first portions 521 and the second portions 522 of theconnecting metals 52 to be formed thereon in the following step as shownin FIG. 11C. Thereafter, a metal layer (such as indium, tin, copper,gold, aluminum, silver) or other electrically conductive layer is formedthrough the opening by vapor deposition to form the first portion 521and the second portion 522. And then, the patterned photoresist PR′ isremoved as shown in FIG. 11D. Next, the unsolidified bonding glue 51 isformed on the driver carrier 21 to cover the connecting metals 52 asshown in FIG. 11E. And, the structure shown in FIG. 11E and the LEDarray 31 are aligned and connected to each other as shown in FIG. 11F.As FIG. 11F shows, in this step, the first portions 521 and the secondportions 522 are melted, and thus, the first portions 521 and the secondportion 522 are able to respectively jointed with the second electrodes317 and the connecting portions 316C, and the bonding glue 51 is curedafter the first portions 521 and the second portions 522 respectivelyjoined to the second electrodes 317 and the connecting portions 316C.

In accordance with the above embodiments, the connecting metal 42/52 maybe formed firstly, and then the bonding glue 41/51 is treated by asuitable process (e.g., heating or irradiation) based on thecharacteristics of the selected material of bonding glue to be cured forforming the bonding layer 40/50. The present application is notparticularly to limit the material and forming method of the bondinglayer in the embodiment. For example, the formation of the bonding glue41/51 is not limited to before or after the driver carrier 21 (having acontrol circuit) connecting with the LED array 31.

As shown in FIGS. 2-9, the side walls of the connecting metal 42/52 aredrawn in a straight line for illustration, but the side walls of thecross-sectional shape of the connecting metal 42/52 in practicalapplication are not limited to the straight line depicted in FIGS. 2-9.The side walls (or outermost surfaces) of the connecting metals 42/52may have a curved shape or an irregular shape, depending on the materialselection and/or processing steps of the bonding layer. For example,when the self-aligned conductive paste is used as the bonding layer, theconductive particles 420 are heated, melted, and gathered at theelectrodes to form the connecting metal 42 which has side wall with acurved shape, or the cross-sectional shape of the connecting metal 42/52may be changed when the bonding glue 41/51 is cured. Therefore, theillustrations of the embodiments are for illustrative purposes only andare not intended to limit the disclosure.

In addition, in the abovementioned embodiments, the grid shapedn-electrodes as shown in FIG. 1 are taken as an example for thedescription of the embodiments, but the disclosure is not limitedthereto. Non-grid shaped n-electrodes may also be applied to theembodiments of the present application. Another embodiment of a non-gridshaped n-electrode pattern is disclosed below.

FIG. 12 shows a top view of an LED array and an electrode in accordancewith another embodiment of the present application. FIG. 13 shows across-sectional view of a display in accordance with one embodiment ofthe present application, wherein the LED array and the electrode aredepicted along cross-section line 13-13 of FIG. 12. The same or similarreference numerals are used for the same or similar components in FIGS.12˜13 and FIGS. 1˜2, and the description of the same components is asdescribed above and will not be described herein. The first electrode316 as shown in FIG. 12 includes a conductive pad 316P located at theperiphery of the LED array 31, which is different from the grid shapedfirst electrode of FIG. 1. The plurality of first and second metaltraces 3161, 3162 extending in the first direction D1 and the seconddirection D2 (e.g., the X, Y directions) shown in FIG. 1 are notprovided in the display shown in FIG. 12. Therefore, in the LED array 31as shown in FIG. 13, there are no metal traces located between the twoadjacent light-emitting units LU. This disclosure does not limit theapplicable first electrodes 316 aspect.

The structures and steps of the abovementioned embodiments are used todescribe some embodiments or application examples of the disclosure, andthe disclosure is not limited to the scope and application of the abovestructures and steps. Other embodiments of different structural aspects,such as known components of different internal components, may beapplicable, and the structures and steps of the examples may be adjusteddepending on the actual application requirements or material selection.Therefore, the structures shown in the drawings are for illustrativepurposes only and are not for limiting. It is generally known to theskilled in the art that the relevant structures and steps of the presentapplication, such as the arrangement of the components and layers of theLED array, the electrodes, the control substrate or the manufacturingsteps, may be adjusted and changed in accordance with practicalapplications

Although the present application has been explained above, it is not thelimitation of the range, the sequence in practice, the material inpractice, or the method in practice. Any modification or decoration forpresent application is not detached from the spirit and the range ofsuch.

What is claimed is:
 1. A display, comprising: a carrier comprising aplurality of pads; an LED array located on the carrier and comprising: afirst semiconductor layer; a plurality of active layers formed under thefirst semiconductor layer and spaced apart from each other; a pluralityof second semi conductor layers respectively formed under each of theplurality of active layers; a plurality of first electrodes formed underthe first semiconductor layer and electrically connected to the firstsemiconductor layers; a plurality of second electrodes respectivelyformed under and electrically connected to each of the plurality ofsecond semiconductor layers; a bonding layer formed between the carrierand the LED array; and a plurality of wavelength conversion elements,separated from each other, and arranged on the LED array in a pluralityof first positions corresponding to the plurality of active layers; andan opaque layer arranged on the LED array to separate the plurality ofwavelength conversion elements from each other.
 2. The display accordingto claim 1, wherein the plurality of wavelength conversion elements isarranged on the LED array without an interposition of growth substrate.3. The display according to claim 1, wherein the plurality of firstelectrodes comprises a plurality of conductive pads located at aperiphery of the LED array.
 4. The display according to claim 3, whereinthe plurality of first electrodes comprises a plurality of metal traceslocated between two adjacent active layers among the plurality of activelayers.
 5. The display according to claim 4, wherein the plurality ofmetal traces comprises a first metal trace and a second metal tracewhich are extended in different directions.
 6. The display according toclaim 4, wherein the plurality of conductive pads surrounds theplurality of metal traces.
 7. The display according to claim 4, whereinthe plurality of metal traces is covered by an insulating layer which isarranged between the bonding layer and the LED array.
 8. The displayaccording to claim 1, wherein the bonding layer comprises a glue and aplurality of connecting metals surrounded by the glue.
 9. The displayaccording to claim 8, wherein the plurality of connecting metalscomprises a first portion connected to the plurality of secondelectrodes, and a second portion connected to the plurality of the firstelectrodes, the second portion is located at a periphery of the firstportion.
 10. The display according to claim 8, wherein the glue isfilled in a space between the plurality of connecting metals, thecarrier, and the LED array.
 11. The display according to claim 8,wherein the glue is filled in a space between two adjacent connectingmetals among the plurality of connecting metals.
 12. The displayaccording to claim 1, wherein the plurality of wavelength conversionelements is configured to be excited to emit different color.
 13. Thedisplay according to claim 1, wherein the plurality of wavelengthconversion elements comprises quantum dots.
 14. The display according toclaim 1, wherein the plurality of wavelength conversion elementscomprises a red wavelength conversion element and a green wavelengthconversion element.
 15. The display according to claim 1, wherein theLED array is configured to emit a blue light or a UV light.
 16. Thedisplay according to claim 1, wherein the carrier comprises a CMOSbackplane.
 17. The display according to claim 1, wherein the opaquelayer has a first top surface, the plurality of wavelength conversionelements has a second top surface which is coplanar with the first topsurface.